Title :
Nanoscale mechanical scratching of graphene using scanning probe microscopy
Author :
Suda, Ryutaro ; Saito, Takashi ; Tseng, A.A. ; Shirakashi, J.
Author_Institution :
Dept. of Electr. & Electron. Eng., Tokyo Univ. of Agric. & Technol., Koganei, Japan
Abstract :
Nanolithography of graphene surfaces using scanning probe microscopy (SPM) scratching with a diamond-coated tip was systematically investigated. The graphene films were obtained by mechanical exfoliation of pyrolytic graphite sheet (PGS). The groove size increased linearly with the applied force. Furthermore, there were no effects of scan speed and scratch angle on the groove size. These results imply that SPM scratch nanolithography is promising for the fabrication of nanoscale graphene devices.
Keywords :
graphene; graphite; nanofabrication; nanolithography; nanostructured materials; scanning probe microscopy; surface treatment; thin films; C; diamond-coated tip; graphene films; graphene surfaces; mechanical exfoliation; nanolithography; nanoscale graphene devices; nanoscale mechanical scratching; pyrolytic graphite sheet; scanning probe microscopy; Force; Graphene; Microscopy; Nanolithography; Nanoscale devices; Silicon; diamond coated tip; nanolithography and graphene; scanning probe microscope; scratch;
Conference_Titel :
Nanoelectronics Conference (INEC), 2013 IEEE 5th International
Conference_Location :
Singapore
Print_ISBN :
978-1-4673-4840-9
Electronic_ISBN :
2159-3523
DOI :
10.1109/INEC.2013.6466024
