Title :
Guided analytic application for interactive flash memory Vt and I-V classification using Spotfire DecisionSite
Author :
Shetty, Shivananda ; Hopper, C. Bradford
Author_Institution :
AMD, Submicron Dev. Center, Sunnyvale, CA, USA
fDate :
31 March-1 April 2003
Abstract :
This paper describes techniques to classify I-V curves and analyze resulting Vt distributions using interactive analytical tools developed and deployed for that purpose on a guided analytics platform called DecisionSite, from Spotfire Inc. An interaction between transistor performance and physical layout was characterized using these methods, and layout changes implemented to reduce this effect have significantly increased the level and consistency of device yield for a new flash memory product. The method for analysis has been encapsulated in a process guide, which facilitates sharing this best practice method with other engineering personnel through a centralized DecisionSite server.
Keywords :
electronic engineering computing; flash memories; integrated circuit layout; integrated circuit yield; integrated memory circuits; manufacturing data processing; I-V curve classification; Spotfire DecisionSite; Vt distributions; centralized DecisionSite server; flash memory product; guided analytic application; interactive flash memory; physical layout; process guide; threshold voltage classification; transistor performance; Best practices; Business; Flash memory; Information retrieval; Manufacturing processes; Performance analysis; Personnel; Process control; Read-write memory; Threshold voltage;
Conference_Titel :
Advanced Semiconductor Manufacturing Conference and Workshop, 2003 IEEEI/SEMI
Print_ISBN :
0-7803-7681-1
DOI :
10.1109/ASMC.2003.1194495