Title :
A pragmatic approach to managing APC FDC in high volume logic production
Author :
Joyce-Wohrmann, R.
Author_Institution :
Infineon Technol. AG, Regensburg, Germany
fDate :
31 March-1 April 2003
Abstract :
At Infineon Technologies APC fault detection is now implemented in many process areas in its high volume fabs. With the APC Software "APC-Trend" process engineers and maintenance can detect and classify anomalies in machine and process parameters and supervise them on the basis of an automated alarming system. An overview of the current usage of APC FDC at Infineon is given.
Keywords :
fault diagnosis; integrated circuit manufacture; process control; APC FDC management; APC-Trend software; IC manufacturing; Infineon Technologies; automated alarming system; fault detection; high volume logic production; semiconductor fab; Automatic control; Engineering management; Etching; Fault detection; Large scale integration; Logic; Plasma measurements; Production; Software maintenance; Software tools;
Conference_Titel :
Advanced Semiconductor Manufacturing Conference and Workshop, 2003 IEEEI/SEMI
Print_ISBN :
0-7803-7681-1
DOI :
10.1109/ASMC.2003.1194511
