A coplanar millimeterwave resonator on silicon

Author

Sattler, S. ; Felgentreff, T. ; Russer, P.

Author_Institution

Lehrstuhl fuer Hochfrequenztechnik, Tech. Univ. Munchen, Germany

fYear

1993

fDate

14-15 June 1993

Firstpage

57

Lastpage

60

Abstract

A coplanar waveguide (CPW) resonator built with a completely coplanar technique on a grounded silicon substrate is discussed. The input impedance is investigated experimentally and numerically. The passive planar structure is extensively studied using a space-domain full-wave analysis method. The resonator is fed by a coplanar transmission line through a capacitive gap and shows a marked resonance at the fundamental coplanar waveguide mode. Calculated and measured data agree to better than 5%.<>

Keywords

MMIC; electric impedance; resonators; silicon; strip line components; CPW; MIMIC; MM-wave type; capacitive gap; coplanar millimeterwave resonator; coplanar transmission line; coplanar waveguide; grounded Si substrate; input impedance; passive planar structure; space-domain full-wave analysis; Coplanar waveguides; Dielectric losses; Electromagnetic coupling; Electromagnetic radiation; Electromagnetic waveguides; Integral equations; Matrices; Silicon; Surface treatment; Transmission line matrix methods;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave and Millimeter-Wave Monolithic Circuits Symposium, 1993. Digest of Papers., IEEE 1993

Conference_Location

Atlanta, GA, USA

Print_ISBN

0-7803-1322-4

Type

conf

DOI

10.1109/MCS.1993.247477

Filename

247477