Micromachined high-Q resonators, low-loss diplexers, and low phase-noise oscillators for a 28 GHz front-end

Author

Brown, Andrew R. ; Rebeiz, Gabriel M.

Author_Institution

Michigan Univ., Ann Arbor, MI, USA

fYear

1999

fDate

1999

Firstpage

247

Lastpage

253

Abstract

This paper presents an alternative method of implementing high-Q resonators using micromachining techniques. Micromachining is used to selectively remove the substrate and suspend conductor patterns to result in very low loss structures that are accurately defined with standard photolithography. This paper demonstrates how this technique can be applied to filters, diplexers, and oscillators at 28 GHz. These components are compact, require no manual tuning, and can be fabricated in large quantities

Keywords

Q-factor; cavity resonator filters; micromachining; microstrip resonators; microwave filters; microwave oscillators; multiplexing equipment; phase noise; 28 GHz; HEMT; SHF; conductor patterns; diplexers; filters; front-end; low loss structures; low phase-noise oscillators; low-loss diplexers; micromachined high-Q resonators; microstrip resonator; oscillators; photolithography; Dielectric substrates; Frequency; Micromachining; Microstrip; Microwave filters; Microwave oscillators; Millimeter wave communication; Millimeter wave technology; Resonator filters; Tuning;

fLanguage

English

Publisher

ieee

Conference_Titel

Radio and Wireless Conference, 1999. RAWCON 99. 1999 IEEE

Conference_Location

Denver, CO

Print_ISBN

0-7803-5454-0

Type

conf

DOI

10.1109/RAWCON.1999.810976

Filename

810976