Title :
Investigation of a gas thermal desorption mechanism in the course of film sputtering for optical waveguides
Author :
Orlikov, L.N. ; Orlikov, N.L. ; Shandarov, S.M.
Author_Institution :
chair Electron devices
Keywords :
Electron optics; Gases; Lithium niobate; Optical films; Optical sensors; Optical surface waves; Optical waveguides; Sputtering; Temperature dependence; Temperature distribution;
Conference_Titel :
Application of the Conversion Research Results for International Cooperation, 1999. SIBCONVERS '99. The Third International Symposium
Conference_Location :
Tomsk, Russia
Print_ISBN :
0-7803-5172-X
DOI :
10.1109/SIBCON.1999.771750
