DocumentCode
339330
Title
Etching of pliezoelectrics in a metal-bearing plasma, scanned over the aurface
Author
Orlikov, L.N. ; Shangin, A.S. ; Shandarov, S.M.
fYear
1999
fDate
1999
Firstpage
42
Lastpage
43
Keywords
Circuits; Dielectric materials; Etching; Frequency; Lithium niobate; Plasma applications; Plasma temperature; Pulse generation; Surface discharges; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Application of the Conversion Research Results for International Cooperation, 1999. SIBCONVERS '99. The Third International Symposium
Print_ISBN
0-7803-5172-X
Type
conf
DOI
10.1109/SIBCON.1999.771751
Filename
771751
Link To Document