DocumentCode
339612
Title
Fluorescent dye based optical position sensing for planar linear motors
Author
Fries, Gregory A. ; Rizzi, Alfred A. ; Hollis, Ralph L.
Author_Institution
Robotics Inst., Carnegie Mellon Univ., Pittsburgh, PA, USA
Volume
2
fYear
1999
fDate
1999
Firstpage
1614
Abstract
Industrial Sawyer motor technology has existed for nearly three decades, traditionally being operated as open-loop positioners. Such systems can attain micron level motion resolution and open-loop repeatability of 10 μm. This paper outlines a optical sensing technique for Sawyer motors which is capable of sub-micron resolution. Such a sensor can easily be integrated into a motor enabling closed-loop control and sub-micron repeatability
Keywords
closed loop systems; linear motors; optical sensors; position control; stepping motors; 10 micron; Sawyer motor; closed-loop control; fluorescent dye; optical sensor; planar linear motors; position sensor; repeatability; stepping motors; submicron resolution; Assembly; Coils; Fluorescence; Magnetic sensors; Optical sensors; Permanent magnet motors; Planar motors; Sensor systems; Stators; Torque;
fLanguage
English
Publisher
ieee
Conference_Titel
Robotics and Automation, 1999. Proceedings. 1999 IEEE International Conference on
Conference_Location
Detroit, MI
ISSN
1050-4729
Print_ISBN
0-7803-5180-0
Type
conf
DOI
10.1109/ROBOT.1999.772590
Filename
772590
Link To Document