A simple and accurate capacitance ratio measurement technique for integrated circuit capacitor arrays

Author

Ning, Zhenqiu ; De Schepper, Luc ; Delecourt, H.-X. ; Gillon, Renaud ; Tack, Marnix

Author_Institution

AMI Semicond. Belgium bvba, Oudenaarde, Belgium

fYear

2005

fDate

4-7 April 2005

Firstpage

159

Lastpage

164

Abstract

The key performance of many analogue circuits is directly dependent on precise capacitance ratios. To perform an accurate characterization of nonunity capacitor ratios, a floating-gate AC nulling technique is proposed. A test-structure containing the floating-gate and a binary-weighted capacitor array has been designed, fabricated and tested in the AMIS C035 process. The technique is proven to be accurate, robust and easy to use.

Keywords

CMOS analogue integrated circuits; capacitance measurement; characteristics measurement; integrated circuit design; integrated circuit testing; CMOS technologies; analogue circuits; binary-weighted capacitor array; capacitance ratio measurement technique; floating-gate AC nulling technique; integrated circuit capacitor arrays; test chip design; test-structure; Ambient intelligence; Analog integrated circuits; Circuit testing; MOS capacitors; MOS devices; Measurement techniques; Parasitic capacitance; Robustness; Software testing; Switches;

fLanguage

English

Publisher

ieee

Conference_Titel

Microelectronic Test Structures, 2005. ICMTS 2005. Proceedings of the 2005 International Conference on

Print_ISBN

0-7803-8855-0

Type

conf

DOI

10.1109/ICMTS.2005.1452251

Filename

1452251