Title :
Novel realistic short structure construction for parasitic resistance de-embedding and on-wafer inductor characterization
Author :
Tao, Jon ; Findley, Paul ; Rezvani, G. Ali
Author_Institution :
RF Micro Devices, San Jose, CA, USA
Abstract :
The paper presents a novel method of using measured S-parameters of a through structure to construct the Z-parameters of a realistic short structure. By using this realistic short structure for parasitic resistance de-embedding, an on-wafer inductor has been characterized, and inductor parameters (Q, L and R) have been accurately extracted.
Keywords :
CMOS integrated circuits; Q-factor; S-parameters; characteristics measurement; electric resistance; electric resistance measurement; inductance; inductance measurement; inductors; radiofrequency integrated circuits; CMOS design; RFIC; S-parameters; Z-parameters; inductor parameters; on-wafer inductor characterization; parasitic resistance de-embedding; realistic short structure construction; through structure; Electrical resistance measurement; Inductance; Inductors; Parasitic capacitance; Performance evaluation; Probes; Q factor; Radio frequency; Scattering parameters; Testing;
Conference_Titel :
Microelectronic Test Structures, 2005. ICMTS 2005. Proceedings of the 2005 International Conference on
Print_ISBN :
0-7803-8855-0
DOI :
10.1109/ICMTS.2005.1452260
