Title :
Fabrication of bimorph with double Pb[Zr,Ti]O3 thick films
Author :
Inoue, Jun-Ichiro ; Kanda, K. ; Fujita, Takashi ; Maenaka, Kazusuke
Author_Institution :
Grad. Sch. of Eng., Univ. of Hyogo, Himeji, Japan
Abstract :
This paper reports depositions of double layers of thick Pb(Zr,Ti)O3 films in order to realize piezoelectric bimorph structures for MEMS(micro electro-mechanical systems) applications. The PZT/PZT bimorph with the total thickness of 5.4 μm, deposited by magnetron sputtering system, is much thicker than conventionally reported ones. The optimization of the sputtering conditions and electrode structures results in preferable electric and ferroelectric characteristics for both top and bottom PZT layers. In addition, the characteristics of the two layers are consistent with each other.
Keywords :
ferroelectric thin films; lead compounds; micromechanical devices; piezoelectric thin films; sputter deposition; MEMS; PZT; electrode structures; ferroelectric characteristics; magnetron sputtering; microelectromechanical system; piezoelectric bimorph structures; size 5.4 mum; thick films; Annealing; Electrodes; Films; Rough surfaces; Sputtering; Surface roughness; Temperature; MEMS; PZT/PZT Bimorph; Sputtering; Thick-film PZT;
Conference_Titel :
Applications of Ferroelectric and Workshop on the Piezoresponse Force Microscopy (ISAF/PFM), 2013 IEEE International Symposium on the
Conference_Location :
Prague
DOI :
10.1109/ISAF.2013.6748686
