Title :
Charge pumping at radio frequencies [MOSFET device interface state density measurement]
Author :
Sasse, G.T. ; de Vries, H. ; Schmitz, J.
Author_Institution :
MESA Res. Inst., Twente Univ., Enschede, Netherlands
Abstract :
In this work, for the first time, charge pump results are shown that are obtained at frequencies in the GHz range. A comparison is made with charge pump results at lower frequencies. A very good agreement is seen between the low frequency charge pump data and the RF charge pump data. Measurement results on dielectrics that suffer from a high leakage current show that a charge pump current can be measured at frequencies above 500 MHz. At lower frequencies the charge pump current is completely overwhelmed by the leakage current and therefore normal charge pump currents are not usable for measuring the interface state density. This indicates that the RF charge pump technique is very promising for measuring the interface state density on ultra thin dielectrics.
Keywords :
MOSFET; dielectric thin films; electric current measurement; interface states; leakage currents; semiconductor device measurement; 2 GHz; 500 MHz; MOSFET devices; RF charge pumping; charge pump current measurement; high leakage current dielectrics; interface state density measurement; ultra thin dielectrics; Charge measurement; Charge pumps; Current measurement; Density measurement; Dielectric measurements; Frequency measurement; Interface states; Leakage current; MOSFET circuits; Radio frequency;
Conference_Titel :
Microelectronic Test Structures, 2005. ICMTS 2005. Proceedings of the 2005 International Conference on
Print_ISBN :
0-7803-8855-0
DOI :
10.1109/ICMTS.2005.1452273