Title :
Precise determination of piezoelectric longitudinal charge coefficients for piezoelectric thin films assisted by finite element modeling
Author :
Stoeckel, C. ; Kaufmann, C. ; Schulze, R. ; Billep, D. ; Gessner, T.
Author_Institution :
Center for Microtechnologies, Chemnitz Univ. of Technol., Chemnitz, Germany
Abstract :
A determination method to identify the piezoelectric longitudinal charge coefficient d33 for thin films on substrate is presented. Finite Element (FE) simulations and measurements at PZT on bulk silicon show correlations of the substrate characteristics and electrode size subject to the displacement of an electric actuated piezoelectric material. FE models are used to identify the d33 independent of the substrate and electrode characteristic. Thereby the piezoelectric longitudinal charge coefficient of 1.1 μm PLD deposited Pb(Zr0.52Ti0.48)O3 (PZT) is calculated d33 = 272.5 pm/V and a small standard deviation of σ = 4 pm/V for different sample geometries is analyzed.
Keywords :
electrodes; finite element analysis; lead compounds; piezoelectric thin films; piezoelectricity; pulsed laser deposition; PLD; PZT; Si; bulk silicon; electric actuated piezoelectric material; electrode size; finite element simulation; piezoelectric longitudinal charge coefficient; piezoelectric thin films; pulsed laser deposition; Area measurement; Charge measurement; Electrodes; Finite element analysis; Piezoelectric materials; Silicon;
Conference_Titel :
Applications of Ferroelectric and Workshop on the Piezoresponse Force Microscopy (ISAF/PFM), 2013 IEEE International Symposium on the
Conference_Location :
Prague
DOI :
10.1109/ISAF.2013.6748725
