Precise determination of piezoelectric longitudinal charge coefficients for piezoelectric thin films assisted by finite element modeling

Author

Stoeckel, C. ; Kaufmann, C. ; Schulze, R. ; Billep, D. ; Gessner, T.

Author_Institution

Center for Microtechnologies, Chemnitz Univ. of Technol., Chemnitz, Germany

fYear

2013

fDate

21-25 July 2013

Firstpage

194

Lastpage

196

Abstract

A determination method to identify the piezoelectric longitudinal charge coefficient d₃₃ for thin films on substrate is presented. Finite Element (FE) simulations and measurements at PZT on bulk silicon show correlations of the substrate characteristics and electrode size subject to the displacement of an electric actuated piezoelectric material. FE models are used to identify the d₃₃ independent of the substrate and electrode characteristic. Thereby the piezoelectric longitudinal charge coefficient of 1.1 μm PLD deposited Pb(Zr_0.52Ti_0.48)O₃ (PZT) is calculated d₃₃ = 272.5 pm/V and a small standard deviation of σ = 4 pm/V for different sample geometries is analyzed.

Keywords

electrodes; finite element analysis; lead compounds; piezoelectric thin films; piezoelectricity; pulsed laser deposition; PLD; PZT; Si; bulk silicon; electric actuated piezoelectric material; electrode size; finite element simulation; piezoelectric longitudinal charge coefficient; piezoelectric thin films; pulsed laser deposition; Area measurement; Charge measurement; Electrodes; Finite element analysis; Piezoelectric materials; Silicon;

fLanguage

English

Publisher

ieee

Conference_Titel

Applications of Ferroelectric and Workshop on the Piezoresponse Force Microscopy (ISAF/PFM), 2013 IEEE International Symposium on the

Conference_Location

Prague

Type

conf

DOI

10.1109/ISAF.2013.6748725

Filename

6748725