Advances in pixel design and wafer fabrication for liquid crystal over silicon SLMs

Author

Underwood, I. ; Breslin, J.A. ; Burns, D.C. ; Snook, M.W.G. ; O´Hara, A. ; Vass, D.G.

Author_Institution

Dept. of Electr. Eng., Edinburgh Univ., UK

fYear

1996

fDate

5-9 Aug. 1996

Firstpage

13

Lastpage

14

Abstract

In this paper we will discuss advances in silicon fabrication technology which have allowed the production of liquid crystal over silicon spatial light modulators (LCOS SLMs) with enhanced specification and performance. We will discuss advances in pixel circuit design and VLSI layout, for both DRAM and SRAM based pixels, which have resulted in higher pixel packing density and improved pixel performance. We will illustrate these advances using examples of our most recent SLM designs.

Keywords

DRAM chips; SRAM chips; VLSI; elemental semiconductors; liquid crystal devices; optical fabrication; optical storage; silicon; smart pixels; spatial light modulators; DRAM; LCOS SLM; SRAM; VLSI layout; liquid crystal over silicon spatial light modulator; pixel circuit design; wafer fabrication; Active matrix liquid crystal displays; Circuit synthesis; Fabrication; Integrated circuit interconnections; Liquid crystal devices; Liquid crystal on silicon; Liquid crystals; Random access memory; Smart pixels; Transistors;

fLanguage

English

Publisher

ieee

Conference_Titel

Advanced Applications of Lasers in Materials Processing/Broadband Optical Networks/Smart Pixels/Optical MEMs and Their Applications. IEEE/LEOS 1996 Summer Topical Meetings:

Conference_Location

Keystone, CO, USA

Print_ISBN

0-7803-3175-3

Type

conf

DOI

10.1109/LEOSST.1996.540723

Filename

540723