Title :
Preparation of TiN films on AZ91C by Cathode Multi Arc Ion and its Performance
Author :
Fan, Duowang ; Wang, Chenglong ; Ming, Lingxiao ; Zhao, Lin ; Liu, Hongzhong
Author_Institution :
Lanzhou Jiaotong Univ., Lanzhou
fDate :
July 29 2007-Aug. 11 2007
Abstract :
TiN films growing, Ti films as interlayers were prepared on AZ91C by CMP equipment. Surface topography, microstructure and hardness of the films were analyzed with high resolution SEM, X-ray EDS and CSM microcharacter hardness tester.
Keywords :
X-ray chemical analysis; crystal microstructure; hardness; hardness testing; ion plating; magnesium alloys; scanning electron microscopy; surface topography; titanium compounds; AZ91C; CSM microcharacter hardness tester; MgJkJk; SEM; TiN; X-ray EDS; cathode multi arc ion plating; film hardness; film microstructure; surface topography; Cathodes; Coatings; Corrosion; Magnesium; Scanning electron microscopy; Substrates; Surface morphology; Surface topography; Testing; Tin;
Conference_Titel :
Nano-Optoelectronics Workshop, 2007. i-NOW '07. International
Conference_Location :
Beijing
Print_ISBN :
978-1-4244-1591-5
DOI :
10.1109/INOW.2007.4302883
