Title :
MEMS macromodels construction method
Author :
Ladogubets, V.V. ; Beznosyk, A.Y. ; Finogenov, A.D. ; Tchkalov, A.V.
Author_Institution :
Nat. Tech. Univ. of Ukraine "KPI", Kiev
Abstract :
It is offered to use a finite-element mathematic model for receiving the equivalent electrical circuit of mechanical components. The given approach is spread on getting the equivalent circuits for MEMS components. To reduce dimensions of the circuits received it is proposed to use the RLC-reduction. The example of getting micro-accelerometerpsilas equivalent electrical circuit is considered.
Keywords :
accelerometers; equivalent circuits; finite element analysis; micromechanical devices; MEMS; RLC reduction; equivalent electrical circuit; finite-element mathematic model; macromodel construction method; mechanical components; micro-accelerometer; Micromechanical devices;
Conference_Titel :
Microwave & Telecommunication Technology, 2008. CriMiCo 2008. 2008 18th International Crimean Conference
Conference_Location :
Sevastopol, Crimea
Print_ISBN :
978-966-335-166-7
Electronic_ISBN :
978-966-335-169-8
DOI :
10.1109/CRMICO.2008.4676326
