Title :
High-efficiency AlGaInP LED with low thermal resistance fabricated by electroplating
Author :
Wei, Wei ; Han, Yan-Jun ; Luo, Yi
Author_Institution :
Tsinghua Univ., Beijing
fDate :
July 29 2007-Aug. 11 2007
Abstract :
Higher light extraction efficiency AlGaInP-based LEDs were fabricated by using metallic substrate based on Cu and Cr electroplating technique, novel metal reflector and surface micro-structures.
Keywords :
III-V semiconductors; aluminium compounds; electroplating; etching; gallium compounds; indium compounds; light emitting diodes; lithography; surface structure; thermal conductivity; AlGaInP; Cu-Cr; LED; electroplating; light extraction efficiency; lithographic patterning; metallic substrate; novel metal reflector; optical design software-Tracepro; surface microstructures; thermal resistance; wet etching; Chromium; Distributed Bragg reflectors; Gallium arsenide; Gold; Laboratories; Light emitting diodes; Substrates; Thermal resistance; Thermal stresses; Wet etching;
Conference_Titel :
Nano-Optoelectronics Workshop, 2007. i-NOW '07. International
Conference_Location :
Beijing
Print_ISBN :
978-1-4244-1591-5
DOI :
10.1109/INOW.2007.4302943
