• DocumentCode
    3398986
  • Title

    High-efficiency AlGaInP LED with low thermal resistance fabricated by electroplating

  • Author

    Wei, Wei ; Han, Yan-Jun ; Luo, Yi

  • Author_Institution
    Tsinghua Univ., Beijing
  • fYear
    2007
  • fDate
    July 29 2007-Aug. 11 2007
  • Firstpage
    184
  • Lastpage
    185
  • Abstract
    Higher light extraction efficiency AlGaInP-based LEDs were fabricated by using metallic substrate based on Cu and Cr electroplating technique, novel metal reflector and surface micro-structures.
  • Keywords
    III-V semiconductors; aluminium compounds; electroplating; etching; gallium compounds; indium compounds; light emitting diodes; lithography; surface structure; thermal conductivity; AlGaInP; Cu-Cr; LED; electroplating; light extraction efficiency; lithographic patterning; metallic substrate; novel metal reflector; optical design software-Tracepro; surface microstructures; thermal resistance; wet etching; Chromium; Distributed Bragg reflectors; Gallium arsenide; Gold; Laboratories; Light emitting diodes; Substrates; Thermal resistance; Thermal stresses; Wet etching;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Nano-Optoelectronics Workshop, 2007. i-NOW '07. International
  • Conference_Location
    Beijing
  • Print_ISBN
    978-1-4244-1591-5
  • Type

    conf

  • DOI
    10.1109/INOW.2007.4302943
  • Filename
    4302943