DocumentCode
3399146
Title
IC MEMS microtransducers
Author
Baltes, H. ; Paul, O. ; Korvink, J.G. ; Schneider, M. ; Buhler, J. ; Schneeberger, N. ; Jaeggi, D. ; Malcovati, P. ; Hornung, M. ; Hiberli, A. ; von Arx, M. ; Mayer, E. ; Funk, J.
Author_Institution
Phys. Electron. Lab., Eidgenossische Tech. Hochschule, Zurich, Switzerland
fYear
1996
fDate
8-11 Dec. 1996
Firstpage
521
Lastpage
524
Abstract
This invited review of the merging of MEMS and IC technology includes a summary of the current technological approaches to IC MEMS, illustrations by selected IC MEMS microtransducer demonstrators, an outline of the MEMS CAD tools SOLIDIS and ICMAT, and a critical evaluation.
Keywords
CMOS integrated circuits; circuit CAD; integrated circuit design; integrated circuit technology; micromachining; microsensors; reviews; CMOS technology; IC MEMS microtransducers; ICMAT; MEMS CAD tools; SOLIDIS; current technological approaches; Biomembranes; CMOS integrated circuits; CMOS process; CMOS technology; Dielectric substrates; Etching; Magnetic anisotropy; Micromachining; Micromechanical devices; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Electron Devices Meeting, 1996. IEDM '96., International
Conference_Location
San Francisco, CA, USA
ISSN
0163-1918
Print_ISBN
0-7803-3393-4
Type
conf
DOI
10.1109/IEDM.1996.553858
Filename
553858
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