Title :
IC MEMS microtransducers
Author :
Baltes, H. ; Paul, O. ; Korvink, J.G. ; Schneider, M. ; Buhler, J. ; Schneeberger, N. ; Jaeggi, D. ; Malcovati, P. ; Hornung, M. ; Hiberli, A. ; von Arx, M. ; Mayer, E. ; Funk, J.
Author_Institution :
Phys. Electron. Lab., Eidgenossische Tech. Hochschule, Zurich, Switzerland
Abstract :
This invited review of the merging of MEMS and IC technology includes a summary of the current technological approaches to IC MEMS, illustrations by selected IC MEMS microtransducer demonstrators, an outline of the MEMS CAD tools SOLIDIS and ICMAT, and a critical evaluation.
Keywords :
CMOS integrated circuits; circuit CAD; integrated circuit design; integrated circuit technology; micromachining; microsensors; reviews; CMOS technology; IC MEMS microtransducers; ICMAT; MEMS CAD tools; SOLIDIS; current technological approaches; Biomembranes; CMOS integrated circuits; CMOS process; CMOS technology; Dielectric substrates; Etching; Magnetic anisotropy; Micromachining; Micromechanical devices; Silicon;
Conference_Titel :
Electron Devices Meeting, 1996. IEDM '96., International
Conference_Location :
San Francisco, CA, USA
Print_ISBN :
0-7803-3393-4
DOI :
10.1109/IEDM.1996.553858
