Design and performance of UHF and L-band oscillators using thin-film resonators on semiconductor substrates

Author

Burns, Stanley G. ; Weber, Robert J.

Author_Institution

Dept. of Electr. Eng. & Comput. Eng., Iowa State Univ., Ames, IA, USA

fYear

1991

fDate

14-17 May 1991

Firstpage

307

Abstract

The authors report on the use of sputter-deposited, thin-film, aluminum nitride resonators as the feedback element in hybrid single-mode, combline, and voltage-controlled UHF and L-band oscillators. The resonators have also been cointegrated on the same substrate with 2-GHz BJTs (bipolar junction transistors). Design techniques and suggestions for novel architectures using this technology are presented

Keywords

MMIC; hybrid integrated circuits; microwave integrated circuits; microwave oscillators; radiofrequency oscillators; thin film circuits; variable-frequency oscillators; 2 GHz; AlN resonators; BJTs; L-band; UHF; bipolar junction transistors; combline; compatible piezoelectric/semiconductor microwave process; feedback element; hybrid single-mode oscillators; oscillators; semiconductor substrates; sputter-deposited; thin-film resonators; voltage-controlled; Filters; Frequency control; L-band; Piezoelectric films; Semiconductor thin films; Sputtering; State feedback; Substrates; Voltage-controlled oscillators; Zinc oxide;

fLanguage

English

Publisher

ieee

Conference_Titel

Circuits and Systems, 1991., Proceedings of the 34th Midwest Symposium on

Conference_Location

Monterey, CA

Print_ISBN

0-7803-0620-1

Type

conf

DOI

10.1109/MWSCAS.1991.252038

Filename

252038