DocumentCode
3399374
Title
Design and simulation of two port RF MEMS resonators
Author
Sundaram, G. Meenakshi ; Angira, Mahesh ; Rangra, Kamaljit
Author_Institution
EEE Dept., BITS, Pilani, India
fYear
2012
fDate
10-12 Jan. 2012
Firstpage
1
Lastpage
3
Abstract
This paper presents detail analysis of MEMS Fixed Fixed beam resonator. Force voltage analogy is being used here for calculating electrical two port equivalent circuit and its component values. Its resonance frequency tuning behavior analyzed by varying dc bias voltages ranging from 0 V to 10 V. The resonant frequency variation with varying elctode air gap is also prediticted.
Keywords
air gaps; equivalent circuits; micromechanical resonators; oscillators; two-port networks; MEMS fixed fixed beam resonator; electrical two port equivalent circuit; electrode air gap; force voltage analogy; resonance frequency tuning behavior; resonant frequency variation; two port RF MEMS resonators; voltage 0 V to 10 V; Atmospheric modeling; Electrodes; Integrated circuit modeling; Mathematical model; Micromechanical devices; Radio frequency; Resonant frequency; ADS; RF MEMS; fixed-fixed; oscillators; resonator;
fLanguage
English
Publisher
ieee
Conference_Titel
Computer Communication and Informatics (ICCCI), 2012 International Conference on
Conference_Location
Coimbatore
Print_ISBN
978-1-4577-1580-8
Type
conf
DOI
10.1109/ICCCI.2012.6158849
Filename
6158849
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