DocumentCode
3399586
Title
High-Contrast Subwavelength Grating Integrated VCSELs with a Large Fabrication Tolerance
Author
Zhou, Ye ; Huang, Michael C Y ; Kern, Johannes ; Chang-Hasnain, Connie J.
Author_Institution
California Univ., Berkeley
fYear
2007
fDate
July 29 2007-Aug. 11 2007
Firstpage
250
Lastpage
251
Abstract
We experimentally demonstrated a very large fabrication tolerance for the high-index-contrast subwavelength grating (HCG) integrated VCSELs, with similar performance over as large as plusmn20% variation in HCG critical dimension.
Keywords
diffraction gratings; laser cavity resonators; optical fabrication; surface emitting lasers; high-contrast subwavelength grating integrated VCSELs; high-index-contrast subwavelength grating; Distributed Bragg reflectors; Gratings; High performance computing; Mirrors; Optical device fabrication; Reflectivity; Semiconductor lasers; Surface emitting lasers; Threshold current; Vertical cavity surface emitting lasers;
fLanguage
English
Publisher
ieee
Conference_Titel
Nano-Optoelectronics Workshop, 2007. i-NOW '07. International
Conference_Location
Beijing
Print_ISBN
978-1-4244-1591-5
Type
conf
DOI
10.1109/INOW.2007.4302976
Filename
4302976
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