Title :
Preparation of TiO films by Cathode Multi Arc Ion and its Performance
Author :
Fan, Duojin ; Fan, Duowang ; Wang, Chenglong ; Ming, Lingxiao ; Zhao, Lin ; Liu, Hongzhong
Author_Institution :
Lanzhou Dachen Automatic Control Syst. Co., Lanzhou
fDate :
July 29 2007-Aug. 11 2007
Abstract :
TiO films were prepared by custom-made Cathode Multi Arc Ion equipment. Experimental test results reveal that our equipment can easly deposite big area scale TIO, particle size is in nanometer scale .
Keywords :
X-ray chemical analysis; crystal microstructure; ion plating; particle size; scanning electron microscopy; surface topography; thin films; titanium compounds; TiO; X-ray energy depressives spectrometers; cathode multi arc ion equipment; film composite; film microstructure; particle size; scanning electron microscope; surface topography; Automatic control; Cathodes; Coatings; Control systems; Materials science and technology; Optical films; Scanning electron microscopy; Substrates; Vacuum technology; X-ray scattering;
Conference_Titel :
Nano-Optoelectronics Workshop, 2007. i-NOW '07. International
Conference_Location :
Beijing
Print_ISBN :
978-1-4244-1591-5
DOI :
10.1109/INOW.2007.4302980
