Title :
An offset-compensated switched-capacitor interface circuit for closed-loop MEMS capacitive accelerometer
Author :
Ting-ting Zhang ; Hao-Jiong Li ; Jing-Qing Huang ; Meng Zhao ; Li-Chen Hong ; Ya-Cong Zhang ; Wen-Gao Lu ; Zhong-Jian Chen
Author_Institution :
Dept. of Microelectron., Peking Univ., Beijing, China
fDate :
Oct. 29 2012-Nov. 1 2012
Abstract :
This paper presents a switched-capacitor readout circuit designed for the closed-loop MEMS capacitive accelerometer with a full scale of ±2g. The offset voltage of amplifiers is compensated and the low-frequency noise is reduced by using CDS technique, thus the precision of the whole system is significantly improved. The chip has been fabricated in a 0.35μm 15V CMOS technology and the equivalent noise acceleration (ENA) of the whole accelerometer system is tested to be 950ng/VHz at 120Hz in atmosphere.
Keywords :
CMOS integrated circuits; accelerometers; amplifiers; capacitive sensors; detector circuits; microsensors; noise; readout electronics; switched capacitor networks; CMOS technology; amplifier offset voltage; closed-loop MEMS capacitive accelerometer; equivalent noise acceleration; offset compensated switched capacitor interface circuit; size 0.35 mum; switched capacitor readout circuit; voltage 15 V; Accelerometers; Equations; Mathematical model; Micromechanical devices; Noise; Sensors; Switching circuits;
Conference_Titel :
Solid-State and Integrated Circuit Technology (ICSICT), 2012 IEEE 11th International Conference on
Conference_Location :
Xi´an
Print_ISBN :
978-1-4673-2474-8
DOI :
10.1109/ICSICT.2012.6466759
