Title :
Controller of Target Power Supply in Multi-Arc Ion Vacuum Deposition
Author :
Li, Yanzhe ; Fan, Duowang ; Yang, Chaohui ; Kong, Linggang ; Zhang, Weizhong
Author_Institution :
Lanzhou Jiaotong Univ., Lanzhou
fDate :
July 29 2007-Aug. 11 2007
Abstract :
A controller based around DSP techniques is built. The purpose of controller is to isolate the faulty or failed target power supply to a nicety, and ensure safety with minimal disruption to vacuum deposition.
Keywords :
controllers; digital signal processing chips; ion beam assisted deposition; power supplies to apparatus; vacuum deposition; DSP technique; failed target power supply; faulty target power supply; multiarc ion vacuum deposition; target power supply controller; Circuit faults; Communication system control; Digital signal processing; Insulated gate bipolar transistors; Power supplies; Protection; Pulse width modulation; Signal processing; Vacuum technology; Voltage;
Conference_Titel :
Nano-Optoelectronics Workshop, 2007. i-NOW '07. International
Conference_Location :
Beijing
Print_ISBN :
978-1-4244-1591-5
DOI :
10.1109/INOW.2007.4302986
