DocumentCode
3400038
Title
Technology and Properties of CrN Films Deposited by Multi-Arc Ion Plating
Author
Yao, Xiaoming ; Ling, Xiaoming ; Jin, Qi ; Fan, Duowang
Author_Institution
Lanzhou Jiaotong Univ., Lanzhou
fYear
2007
fDate
July 29 2007-Aug. 11 2007
Firstpage
298
Lastpage
299
Abstract
CrN films were deposited using Multi Arc Ion equipment on M35 steel. The experiment results indicate that the flow ratio of N2 to Ar play an important role in the properties of films.
Keywords
chromium compounds; hardness; ion beam assisted deposition; CrN; FeCJk; M35 steel; deposition parameters; films performance; flow ratio; hardness; multiarc ion plating; Argon; Building materials; Chromium; Cleaning; Educational technology; Intelligent control; Steel; Temperature; Tin; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Nano-Optoelectronics Workshop, 2007. i-NOW '07. International
Conference_Location
Beijing
Print_ISBN
978-1-4244-1591-5
Type
conf
DOI
10.1109/INOW.2007.4303000
Filename
4303000
Link To Document