DocumentCode
3400174
Title
Dependence of thin film growth on substrate temperature Kinetic Monte Carlo simulation of thin film growth
Author
Zheng, Xiao-Ping ; Zhang, Pei-Feng ; Fan, Duo-Wang
Author_Institution
Lanzhou Jiaotong Univ., Lanzhou
fYear
2007
fDate
July 29 2007-Aug. 11 2007
Firstpage
310
Lastpage
311
Abstract
A three-dimensional KMC technique has been developed for simulating growth of thin films. The surface roughness and the relative density of the films were simulated as functions of growth substrate temperature and deposition rate.
Keywords
Monte Carlo methods; surface roughness; thin films; relative density; substrate temperature; surface roughness; thin film growth; three-dimensional kinetic Monte Carlo simulation; Educational technology; Information science; Intelligent control; Kinetic theory; Laboratories; Rough surfaces; Substrates; Surface roughness; Temperature dependence; Transistors;
fLanguage
English
Publisher
ieee
Conference_Titel
Nano-Optoelectronics Workshop, 2007. i-NOW '07. International
Conference_Location
Beijing
Print_ISBN
978-1-4244-1591-5
Type
conf
DOI
10.1109/INOW.2007.4303006
Filename
4303006
Link To Document