DocumentCode
3400637
Title
Enhanced Sensitivity of Mass Detection Using the First Torsional Mode of Microcantilevers
Author
Xie, Hui ; Vitard, Julien ; Haliyo, Sinan ; Régnier, Stéphane
Author_Institution
Pierre & Marie Curie Univ. - Paris VI/CNRS, Fontenay-aux-Roses
fYear
2007
fDate
5-8 Aug. 2007
Firstpage
39
Lastpage
44
Abstract
Using higher resonant modes of microcantilevers promises higher sensitivity in the bio/chemical molecular detection. Compared with the first flexure modes, the first torsional mode can provide an improved mass-sensing resolution due to the higher quality factor. For the accurate characterization of the torsional mode and further detection of the multi-mass attached to the microcantilevers, models based on the Rayleigh-Ritz method, considering the attaching positions of the micro and nano objects adhered to the microcantilevers is developed. An ragweed pollen, as target mass are located on different positions on a commercial microcantilever for the contrastive experiments of the first and second flexure and the first torsional resonances in the air. From experimental vibration spectrums of the "cantilever-object" system, we can get that the mass sensitivity of the torsional mode is an order higher than the conventionally used the first flexural mode. The torsional mode can offer significantly enhanced mass sensitivity within the realm of existing microcantilever technology.
Keywords
cantilevers; micromechanical devices; enhanced sensitivity; mass detection; microcantilevers; resonant frequency; torsional mode; Atomic force microscopy; Cells (biology); Frequency measurement; Mechatronics; Nanobioscience; Nanotechnology; Resonance; Resonant frequency; Robot sensing systems; Robotics and automation; Mass detection; microcantilever; resonant frequency; the first torsional mode;
fLanguage
English
Publisher
ieee
Conference_Titel
Mechatronics and Automation, 2007. ICMA 2007. International Conference on
Conference_Location
Harbin
Print_ISBN
978-1-4244-0828-3
Electronic_ISBN
978-1-4244-0828-3
Type
conf
DOI
10.1109/ICMA.2007.4303513
Filename
4303513
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