Study on Micro Electrical Discharge Deposition in Air

Author

Wang, Zhenlong ; Cui, JingZhi ; Jin, BaiDong

Author_Institution

Harbin Inst. of Technol., Harbin

fYear

2007

fDate

5-8 Aug. 2007

Firstpage

63

Lastpage

68

Abstract

The formation mechanism of micro three-dimensional spiral structure is discussed. Simulations of deposition ions trace in deposition process, which is the key of forming micro three-dimensional spiral structure, are performed. It is found that the deposition ions trace is of a helix shape. The simulation results correspond well with the deposit structure obtained in the test. It is found from the simulation results that the distribution of electromagnetic field in discharge channel has a considerable influence on the deposition structure and movement of deposited particles.

Keywords

discharges (electric); electrodeposition; electromagnetic fields; micromachining; discharge channel; electromagnetic field distribution; formation mechanism; ion trace deposition; microelectrical discharge deposition; particle deposition; three-dimensional spiral structure; Anodes; Cathodes; Computational modeling; Electrodes; Electromagnetic fields; Machining; Plasma measurements; Plasma simulation; Spirals; Testing; Electrical discharge deposition; PIC method; discharge channel;

fLanguage

English

Publisher

ieee

Conference_Titel

Mechatronics and Automation, 2007. ICMA 2007. International Conference on

Conference_Location

Harbin

Print_ISBN

978-1-4244-0828-3

Electronic_ISBN

978-1-4244-0828-3

Type

conf

DOI

10.1109/ICMA.2007.4303517

Filename

4303517