Title :
Study on Micro Electrical Discharge Deposition in Air
Author :
Wang, Zhenlong ; Cui, JingZhi ; Jin, BaiDong
Author_Institution :
Harbin Inst. of Technol., Harbin
Abstract :
The formation mechanism of micro three-dimensional spiral structure is discussed. Simulations of deposition ions trace in deposition process, which is the key of forming micro three-dimensional spiral structure, are performed. It is found that the deposition ions trace is of a helix shape. The simulation results correspond well with the deposit structure obtained in the test. It is found from the simulation results that the distribution of electromagnetic field in discharge channel has a considerable influence on the deposition structure and movement of deposited particles.
Keywords :
discharges (electric); electrodeposition; electromagnetic fields; micromachining; discharge channel; electromagnetic field distribution; formation mechanism; ion trace deposition; microelectrical discharge deposition; particle deposition; three-dimensional spiral structure; Anodes; Cathodes; Computational modeling; Electrodes; Electromagnetic fields; Machining; Plasma measurements; Plasma simulation; Spirals; Testing; Electrical discharge deposition; PIC method; discharge channel;
Conference_Titel :
Mechatronics and Automation, 2007. ICMA 2007. International Conference on
Conference_Location :
Harbin
Print_ISBN :
978-1-4244-0828-3
Electronic_ISBN :
978-1-4244-0828-3
DOI :
10.1109/ICMA.2007.4303517
