Title :
Nanostructures of Si/SiO2/metal systems with swift heavy ion tracks
Author :
Kaniukov, E.Yu. ; Demyanov, S.E. ; Petrov, A.V.
Author_Institution :
Sci.-Practical Mater. Res. Centre, NAS of Belarus, Minsk
Abstract :
Structures on the base of n-Si/SiO2 with nanopores in silicon dioxide layers filled with Cu and Ni particles are prepared by means of the swift heavy ion track technology, and investigated. A selectivity of nanopores filling with metals is shown. Current-voltage characteristics of the studied structures are carried out and a feasibility of the TEMPOS technology application for a creation of magnetically sensitive structures is presented.
Keywords :
copper; elemental semiconductors; ion beam effects; nanoporous materials; nickel; silicon; silicon compounds; Cu; Ni; Si-SiO2; TEMPOS technology; current-voltage characteristics; magnetically sensitive structures; metal systems; nanopores; nanostructures; silicon dioxide layers; swift heavy ion tracks; Etching; Helium; IEEE catalog; Inorganic materials; Microwave technology; Nanostructured materials; Nanostructures; Organizing; Semiconductor materials;
Conference_Titel :
Microwave & Telecommunication Technology, 2008. CriMiCo 2008. 2008 18th International Crimean Conference
Conference_Location :
Sevastopol, Crimea
Print_ISBN :
978-966-335-166-7
Electronic_ISBN :
978-966-335-169-8
DOI :
10.1109/CRMICO.2008.4676510
