The design and construction of a mechanical radiation detector

A method for constructing pliable bodies that respond to radiation impact is discussed. Microelectronic fabrication techniques are used to build the deflecting microstructures. The body motion is detected by measuring the capacitance change between the lever and a ground pad. This measurement technique requires levers that have low intrinsic stress. The stresses for polysilicon and silicon nitride thin films are measured. Stress balance is demonstrated between compressive polysilicon and tensile silicon nitride layers. The stress of 45.9 nm of doped polysilicon is reduced from -2140.08 MPa to -106.40 MPa by the addition of a 43.0 nm silicon nitride layer