Numerical analysis of near-infrared wave propagation properties in a coated parallel planar waveguide structure for micromachined immunosensor applications

Author

Van Petegem, W. ; James, C.R. ; Vermeulen, F.E. ; Robinson, A.M.

Author_Institution

Div. of Biomech. & Graphical Design, Katholieke Univ., Leuven, Heverlee, Belgium

Volume

2

fYear

1995

fDate

20-23 Sep 1995

Firstpage

1565

Abstract

The EM wave propagation properties of layered planar microstructural waveguides are studied for their potential use in immunosensing. Simulation results are presented on the propagation of a 1 μm EM wave in a parallel planar waveguide. Its walls are made of Si, coated with a thin layer of SiO₂ and separated by a fluid. The propagation characteristics of even and odd TE and TM modes are analysed as a function of the coating thickness. It is shown that the propagation of TE modes exhibits a sudden shift in power flow distribution from the fluid to the coating when the coating exceeds a critical thickness, a property that may be exploited for micromachined immunosensor applications

Keywords

biosensors; micromachining; microsensors; optical planar waveguides; optical sensors; optical waveguide theory; 1 mum; EM wave propagation properties; Si walls; SiO₂ thin layer; TE modes; TM modes; coated parallel planar waveguide structure; coating thickness; critical thickness; even modes; fluid; immunosensing; layered planar microstructural waveguides; micromachined immunosensor applications; near-infrared wave propagation properties; numerical analysis; odd modes; power flow distribution; Attenuation; Biomechanics; Buildings; Coatings; Immune system; Load flow; Maxwell equations; Numerical analysis; Planar waveguides; Tellurium;

fLanguage

English

Publisher

ieee

Conference_Titel

Engineering in Medicine and Biology Society, 1995., IEEE 17th Annual Conference

Conference_Location

Montreal, Que.

Print_ISBN

0-7803-2475-7

Type

conf

DOI

10.1109/IEMBS.1995.579830

Filename

579830