Title :
Numerical analysis of near-infrared wave propagation properties in a coated parallel planar waveguide structure for micromachined immunosensor applications
Author :
Van Petegem, W. ; James, C.R. ; Vermeulen, F.E. ; Robinson, A.M.
Author_Institution :
Div. of Biomech. & Graphical Design, Katholieke Univ., Leuven, Heverlee, Belgium
Abstract :
The EM wave propagation properties of layered planar microstructural waveguides are studied for their potential use in immunosensing. Simulation results are presented on the propagation of a 1 μm EM wave in a parallel planar waveguide. Its walls are made of Si, coated with a thin layer of SiO2 and separated by a fluid. The propagation characteristics of even and odd TE and TM modes are analysed as a function of the coating thickness. It is shown that the propagation of TE modes exhibits a sudden shift in power flow distribution from the fluid to the coating when the coating exceeds a critical thickness, a property that may be exploited for micromachined immunosensor applications
Keywords :
biosensors; micromachining; microsensors; optical planar waveguides; optical sensors; optical waveguide theory; 1 mum; EM wave propagation properties; Si walls; SiO2 thin layer; TE modes; TM modes; coated parallel planar waveguide structure; coating thickness; critical thickness; even modes; fluid; immunosensing; layered planar microstructural waveguides; micromachined immunosensor applications; near-infrared wave propagation properties; numerical analysis; odd modes; power flow distribution; Attenuation; Biomechanics; Buildings; Coatings; Immune system; Load flow; Maxwell equations; Numerical analysis; Planar waveguides; Tellurium;
Conference_Titel :
Engineering in Medicine and Biology Society, 1995., IEEE 17th Annual Conference
Conference_Location :
Montreal, Que.
Print_ISBN :
0-7803-2475-7
DOI :
10.1109/IEMBS.1995.579830
