Title :
Measuring information signals in microwave micro- and nanodiagnostics of semiconductor materials and structures
Author :
Gordienko, Y.E. ; Petrov, V.V. ; Slipchenko, N.I.
Author_Institution :
Kharkiv Nat. Univ. of Radioelectron., Kharkiv
Abstract :
In this work results of theoretical and the experimental researches directed on development of microwave microscopy of semiconductor materials and structures are given. The basic attention is given to formation of theoretical representation of the signals of measuring information which is put in the basis of the new development connected.
Keywords :
microscopy; microwave measurement; semiconductor materials; information signal measurement; microwave micro; microwave microscopy; semiconductor material nanodiagnostic; Erbium; Microwave measurements; Nanostructured materials; Semiconductor materials;
Conference_Titel :
Microwave & Telecommunication Technology, 2008. CriMiCo 2008. 2008 18th International Crimean Conference
Conference_Location :
Sevastopol, Crimea
Print_ISBN :
978-966-335-166-7
Electronic_ISBN :
978-966-335-169-8
DOI :
10.1109/CRMICO.2008.4676573
