Silicon-based microwave coplanar waveguide BPF/BSF realization by open/short stubs

Author

Di, Shen ; Yanling, Shi ; Yu, Xu ; Hongmei, Hu ; Peisheng, Xi ; Yun, Liu ; Ling, Jiang

Author_Institution

Dept. of EE, East China Normal Univ., Shanghai, China

Volume

1

fYear

2005

fDate

4-7 Dec. 2005

Abstract

Microwave CPW bandpass/bandstop filters achieved by CPW open/short stubs have been presented. The filters are designed by a RF tool of HFSS and fabricated on a high resistivity (HR) (ρ ≥ 1000Ω·cm) silicon substrate with 1-μm SiO₂. The BPF accomplished by a dual-termination coupling open stub demonstrates low radiation with only -2.25dB insertion loss at peak transmission of 32 GHz on SiO₂/Si substrate. The BSF realized by a multi-finger short stub on a SiO₂/Si substrate has the attenuation of -17.5dB at the transmission frequency of 25 GHz. The filters have small size and good S-parameter characteristics, so they are attractive for monolithic microwave circuits (MMICs).

Keywords

S-parameters; band-pass filters; band-stop filters; circuit simulation; coplanar waveguides; elemental semiconductors; microwave filters; silicon; silicon compounds; waveguide filters; -2.25 dB; 1 micron; 25 GHz; 32 GHz; HFSS RF tool; S-parameter characteristics; SiO₂-Si; bandpass filter; bandstop filter; dual-termination coupling open stub; high frequency structure simulator; monolithic microwave circuits; multifinger short stub; silicon-based microwave coplanar waveguide; Attenuation; Band pass filters; Conductivity; Coplanar waveguides; Couplings; Insertion loss; Microwave filters; Propagation losses; Radio frequency; Silicon; Coplanar waveguide (CPW); bandpass filter; bandstop filter; open/short stub;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave Conference Proceedings, 2005. APMC 2005. Asia-Pacific Conference Proceedings

Print_ISBN

0-7803-9433-X

Type

conf

DOI

10.1109/APMC.2005.1606289

Filename

1606289