Integrated biosensors in CMOS

This paper reviews several integrated biosensing technologies compatible with standard CMOS process. With a particular focus on detecting biomolecules and molecular interactions, the selected sensing modalities include electrochemical biosensor, fluorescent biosensor, magnetic biosensor, and gravimetric biosensor. For each modality, the sensing mechanism is first presented, and is then followed by a typical design example. Advantages as well as limitations of the sensing technology are also discussed.