Title :
Characteristics measurements of the 100/spl times/110 /spl mu/m/sup 2/ fabricated micro mirror
Author :
Seok-Whan Chung ; Jong-Woo Shin ; Yong-Kweon Kim ; Ho-Seong Kim ; Lee, E. ; Bum-Kyoo Choi ; Se-Jin Ahn
Author_Institution :
Sch. of Electr. Eng., Seoul Nat. Univ., South Korea
Abstract :
A 100/spl times/110 /spl mu/m/sup 2/ aluminum micro mirror is designed and fabricated using a thick photoresist as a sacrificial layer and as a mold for nickel electroplating. The micro mirror is composed of aluminum mirror plate, two nickel support posts, two aluminum hinges, two address electrodes, and two landing electrodes. The aluminum mirror plate, which is supported by two nickel support posts, is overhung about 10 /spl mu/m from the silicon substrate. The aluminum mirror plate is actuated like a seesaw by electrostatic force generated by electrostatic potential difference applied between the mirror plate and the address electrode. This paper presents some methods to measure the optical and the dynamic characteristics of the fabricated micro mirror.
Keywords :
aluminium; electroplated coatings; microactuators; mirrors; optical fabrication; 100 micron; 110 micron; Al; Ni; address electrode; aluminum hinge; aluminum mirror plate; design; dynamic characteristics; electroplating; electrostatic force; fabrication; landing electrode; micromirror; mold; nickel support post; optical characteristics; photoresist; sacrificial layer; seesaw actuation; silicon substrate; Aluminum; Diodes; Electrodes; Electrostatic measurements; Fasteners; Microactuators; Mirrors; Nickel; Optical device fabrication; Resists;
Conference_Titel :
Advanced Applications of Lasers in Materials Processing/Broadband Optical Networks/Smart Pixels/Optical MEMs and Their Applications. IEEE/LEOS 1996 Summer Topical Meetings:
Conference_Location :
Keystone, CO, USA
Print_ISBN :
0-7803-3175-3
DOI :
10.1109/LEOSST.1996.540768
