DocumentCode
3403447
Title
Thin-film free-space optical components micromachined in silicon
Author
Vdovin, G. ; Middelhoek, S.
Author_Institution
Lab. of Electron. Instrum., Delft Univ. of Technol., Netherlands
fYear
1996
fDate
5-9 Aug. 1996
Firstpage
5
Lastpage
6
Abstract
We describe the basic technology and some applications of free-space electrically-controlled micromachined optical components. The technology is based on using stretched nitride films as a substrate for reflecting optical devices.
Keywords
micromachining; optical fabrication; optical films; silicon; Si; electrically-controlled micromachining; reflecting optical device; silicon; stretched nitride film substrate; thin-film free-space optical component; Adaptive optics; Biomembranes; Etching; Mirrors; Optical devices; Optical films; Optical interferometry; Optical modulation; Semiconductor thin films; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Advanced Applications of Lasers in Materials Processing/Broadband Optical Networks/Smart Pixels/Optical MEMs and Their Applications. IEEE/LEOS 1996 Summer Topical Meetings:
Conference_Location
Keystone, CO, USA
Print_ISBN
0-7803-3175-3
Type
conf
DOI
10.1109/LEOSST.1996.540769
Filename
540769
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