Title :
Study and fabrication of laser and infrared two-wavebands antireflection film
Author :
Yongliang, Yang ; Guojun, Liu ; Xiuhua, Fu ; Meixuan, Li ; Zhuolin, Li
Author_Institution :
Changchun Univ. of Sci. & Technol., Changchun, China
Abstract :
According to the requirement of a particular optical instrument, the substrate was sapphire and ZnS and YbF3 were chosen as high index and low index materials respectively, Macleod and TFCalc software were used to design and optimize the film stack, the deposition technology chosen was electron beam vacuum depositing method with the aid of ion assistance. An antireflection coating required with a transmittance at 1064nm wavelength of greater than 97% and the average transmittance over 95% in 3 ~ 5μm wavebands was achieved in practice. An inner barrier layer (M1) was added to improve the laser induced damage threshold (LIDT) of the AR coatings. The film meets the requirements of the optical instrument.
Keywords :
antireflection coatings; electron beam deposition; infrared spectra; ion beam assisted deposition; laser beam effects; optical design techniques; optical films; physics computing; vacuum deposited coatings; Al2O3; Macleod software; TFCalc software; YbF3; YbF3 substrate; ZnS; ZnS substrate; antireflection coating; electron beam vacuum depositing method; high index materials; infrared two-waveband antireflection film; inner barrier layer; ion assistance; laser fabrication; laser induced damage threshold; low index materials; optical instrument; sapphire substrate; transmittance; wavelength 1064 nm; Coatings; Films; Lasers; Measurement by laser beam; Software; Substrates; Antireflection coatings; Inner barrier layer; Ion assistant deposition; Laser induced damage threshold;
Conference_Titel :
Optoelectronics and Microelectronics Technology (AISOMT), 2011 Academic International Symposium on
Conference_Location :
Harbin
Print_ISBN :
978-1-4577-0794-0
DOI :
10.1109/AISMOT.2011.6159303
