Breakdown mechanisms of electrostatic polysilicon actuators using as an example the REMO-component

Author

Marxer, C. ; Gretillat, M.A. ; de Rooij, N.F.

Author_Institution

Inst. of Microtechnol., Neuchatel Univ., Switzerland

fYear

1996

fDate

5-9 Aug. 1996

Firstpage

15

Lastpage

16

Abstract

The REMO (REflective MOdulator) component is a micromechanical light modulator fabricated by polysilicon surface micromachining. Its operation principle is based on a Fabry-Perot consisting of two polysilicon mirrors. In the present paper a systematic study of the effects of high operation stresses in combination with humid air is presented. Slow crack growth is evaluated by visual inspection of precracked structures. Electrical and mechanical drift phenomena are characterized by recording the resonance frequency in vacuum after continuous operation during several weeks.

Keywords

Fabry-Perot resonators; corrosion testing; cracks; electro-optical modulation; electrostatic devices; elemental semiconductors; fatigue testing; fracture toughness testing; microactuators; micromechanical resonators; semiconductor device reliability; silicon; Fabry-Perot; REMO-component; Si; breakdown mechanisms; continuous operation; corrosion; electrical drift phenomena; electrostatic polysilicon actuators; high operation stresses; humid air; long cycle fatigue; mechanical breakdown; mechanical drift phenomena; micromechanical light modulator; polysilicon mirrors; polysilicon surface micromachining; precracked structures; reflective modulator component; resonance frequency; rupture strength; slow crack growth; visual inspection; Electric breakdown; Electrostatic actuators; Fabry-Perot; Inspection; Micromachining; Micromechanical devices; Mirrors; Optical modulation; Stress; Surface cracks;

fLanguage

English

Publisher

ieee

Conference_Titel

Advanced Applications of Lasers in Materials Processing/Broadband Optical Networks/Smart Pixels/Optical MEMs and Their Applications. IEEE/LEOS 1996 Summer Topical Meetings:

Conference_Location

Keystone, CO, USA

Print_ISBN

0-7803-3175-3

Type

conf

DOI

10.1109/LEOSST.1996.540774

Filename

540774