DocumentCode
3403572
Title
Silicon etalon arrays for IR transform spectroscopy
Author
Fenner, D.B. ; Carangelo, R.M. ; Kung, P.-J. ; Hamblen, D.G. ; Budnick, J.I.
Author_Institution
AFR Inc., East Hartford, CT, USA
fYear
1996
fDate
5-9 Aug. 1996
Firstpage
23
Lastpage
24
Abstract
A model, simulations, and fabrication concepts are presented for a spectrometer-on-a-chip : an array of micromachined stepped-thickness, low-finesse, silicon etalon plates, optically coupled to an IR detector array.
Keywords
Fourier transform spectroscopy; arrays; infrared spectroscopy; light interferometers; micromachining; silicon; IR transform spectroscopy; Si; fabrication; micromachining; model; silicon etalon array; simulation; spectrometer-on-a-chip; Bandwidth; Infrared detectors; Infrared spectra; Optical arrays; Optical device fabrication; Optical interferometry; Optical refraction; Sensor arrays; Silicon; Spectroscopy;
fLanguage
English
Publisher
ieee
Conference_Titel
Advanced Applications of Lasers in Materials Processing/Broadband Optical Networks/Smart Pixels/Optical MEMs and Their Applications. IEEE/LEOS 1996 Summer Topical Meetings:
Conference_Location
Keystone, CO, USA
Print_ISBN
0-7803-3175-3
Type
conf
DOI
10.1109/LEOSST.1996.540778
Filename
540778
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