Title :
Coupled-cavity laser diode with micromachined external mirror
Author_Institution :
NTT Interdisciplinary Res. Lab., Tokyo, Japan
Abstract :
Micromachining technology presents a great opportunity for developing on-chip mechanical components that can be integrated with a laser diode (LD). We have developed micromachined external mirrors to composite a compact coupled-cavity LD for both optical-communication and optical-sensing systems.
Keywords :
laser cavity resonators; laser mirrors; micromachining; semiconductor lasers; coupled-cavity laser diode; micromachined external mirror; on-chip mechanical component; optical communication; optical sensing; Diode lasers; Micromechanical devices; Micromirrors; Mirrors; Nickel; Optical coupling; Optical devices; Silicon; Structural beams; Tunable circuits and devices;
Conference_Titel :
Advanced Applications of Lasers in Materials Processing/Broadband Optical Networks/Smart Pixels/Optical MEMs and Their Applications. IEEE/LEOS 1996 Summer Topical Meetings:
Conference_Location :
Keystone, CO, USA
Print_ISBN :
0-7803-3175-3
DOI :
10.1109/LEOSST.1996.540782
