Title :
Surface-micromachined micro-XYZ stages for free-space micro-optical bench
Author :
Lin, L.Y. ; Shen, J.L. ; Lee, S.S. ; Wu, M.C.
Author_Institution :
Dept. of Electr. Eng., California Univ., Los Angeles, CA, USA
Abstract :
The surface-micromachined free-space micro-optical bench (FS-MOB) has demonstrated its potential for monolithically integrating entire micro-optical systems on a single chip. In this paper, we propose a novel integrated XYZ stage with three degrees of freedom for precise on-chip optical alignment as well as input/output coupling for the FS-MOB.
Keywords :
integrated optics; laser beams; lenses; micromachining; optical fabrication; beam steering device; free-space micro-optical bench; input/output coupling; integrated XYZ stage; micro-Fresnel lens; monolithic integration; on-chip optical alignment; surface-micromachined micro-XYZ stages; Actuators; Drives; Integrated optics; Laser beams; Lenses; Micromirrors; Mirrors; Optical beams; Optical sensors; Semiconductor lasers;
Conference_Titel :
Advanced Applications of Lasers in Materials Processing/Broadband Optical Networks/Smart Pixels/Optical MEMs and Their Applications. IEEE/LEOS 1996 Summer Topical Meetings:
Conference_Location :
Keystone, CO, USA
Print_ISBN :
0-7803-3175-3
DOI :
10.1109/LEOSST.1996.540784
