A surface micromachined rotating micro-mirror normal to the substrate

Author

Reid, J.R. ; Bright, V.M. ; Comtois, J.H.

Author_Institution

Air Force Inst. of Technol., Wright-Patterson AFB, OH, USA

fYear

1996

fDate

5-9 Aug. 1996

Firstpage

39

Lastpage

40

Abstract

An optical mirror for directing a laser parallel to the substrate surface has been designed and fabricated. The mirror consists of a 214 /spl mu/m/spl times/210 /spl mu/m, 3.5 /spl mu/m thick polysilicon plate, coated with a 0.5 /spl mu/m thick layer of gold. The mirror is connected to the substrate by 3 floating substrate hinges. Using microprobes, the mirror is lifted off of the substrate and up into a latch mechanism. The latch holds the mirror normal to the substrate. The floating substrate hinges are connected to a 200 /spl mu/m diameter circular 2.0 /spl mu/m thick polysilicon plate. This plate is mounted to the substrate via a rotating sliding anchor. The mirror is designed to be driven by an array of thermal actuators.

Keywords

laser beams; microactuators; micromachining; mirrors; optical fabrication; 0.5 mum; 2 mum; 3.5 mum; Si; Si-Au; floating substrate hinges; laser beam direction; latch mechanism; microprobes; polysilicon plate; rotating sliding anchor; surface micromachined rotating micro-mirror; thermal actuator array drive; Actuators; Fabrication; Fasteners; Gold; Micromotors; Mirrors; Optical design; Plasma welding; Surface emitting lasers; Teeth;

fLanguage

English

Publisher

ieee

Conference_Titel

Advanced Applications of Lasers in Materials Processing/Broadband Optical Networks/Smart Pixels/Optical MEMs and Their Applications. IEEE/LEOS 1996 Summer Topical Meetings:

Conference_Location

Keystone, CO, USA

Print_ISBN

0-7803-3175-3

Type

conf

DOI

10.1109/LEOSST.1996.540785

Filename

540785