Packaging of a reflective optical duplexer based on silicon micromechanics

Author

Valk, B. ; Vogel, P. ; Marxer, C. ; Gretillat, M.

fYear

1996

fDate

5-9 Aug. 1996

Firstpage

61

Lastpage

62

Abstract

We present a fully packaged duplexer implementing a reflective Fabry-Perot modulator realised by silicon surface micromachining. The device demonstrates excellent performance for bit rates up to 2.8 Mbit/s. Relaxed positioning tolerances, a fiber to fiber loss below 3 dB, an extinction ratio better than 12 dB, and the potential for low cost fabrication make this device very attractive for use in economical optical links.

Keywords

Fabry-Perot resonators; electro-optical modulation; electro-optical switches; light reflection; micromachining; micromechanical resonators; optical fibre losses; optical fibre subscriber loops; semiconductor device packaging; 2.8 Mbit/s; 3 dB; Si; Si micromechanics; Si surface micromachining; bit rates; extinction ratio; fiber in the loop; fiber to fiber loss; low cost fabrication; optical MEMS technology; optical links; packaging; reflective Fabry-Perot modulator; reflective optical duplexer; relaxed positioning tolerances; Bit rate; Costs; Extinction ratio; Fabry-Perot; Micromachining; Optical fiber devices; Optical fiber losses; Optical modulation; Packaging; Silicon;

fLanguage

English

Publisher

ieee

Conference_Titel

Advanced Applications of Lasers in Materials Processing/Broadband Optical Networks/Smart Pixels/Optical MEMs and Their Applications. IEEE/LEOS 1996 Summer Topical Meetings:

Conference_Location

Keystone, CO, USA

Print_ISBN

0-7803-3175-3

Type

conf

DOI

10.1109/LEOSST.1996.540794

Filename

540794