Optical crossconnection by silicon micromachined torsion mirrors

Author

Toshiyoshi, Hiroshi ; Fujita, Hiroyuki

Author_Institution

Inst. of Ind. Sci., Tokyo Univ., Japan

fYear

1996

fDate

5-9 Aug. 1996

Firstpage

63

Lastpage

64

Abstract

We have developed a new type of free-space 2/spl times/2 optical switching matrix composed of micro torsion mirrors operated electrostatically. To suppress the loss of the light-beam traveling in free-space, we use collimated-beam optical fibers for coupling. It is shown that micromachined torsion-mirrors are suitable to integrate monolithic optical-crossconnectors of large attenuation ratio and small crosstalk. The configuration of the switches presented here is expandable for n/spl times/n (n>2).

Keywords

electrostatic devices; elemental semiconductors; integrated optics; micromechanical devices; mirrors; optical crosstalk; optical fabrication; optical fibre couplers; optical interconnections; optical switches; silicon; Si; Si micromachined torsion mirrors; collimated-beam optical fiber coupling; electrostatic operation; free-space 2/spl times/2 optical switching matrix; large attenuation ratio; loss suppression; micro torsion mirrors; monolithic optical-crossconnector integration; small crosstalk; Integrated optics; Mirrors; Optical attenuators; Optical collimators; Optical coupling; Optical crosstalk; Optical fiber losses; Optical fibers; Optical switches; Silicon;

fLanguage

English

Publisher

ieee

Conference_Titel

Advanced Applications of Lasers in Materials Processing/Broadband Optical Networks/Smart Pixels/Optical MEMs and Their Applications. IEEE/LEOS 1996 Summer Topical Meetings:

Conference_Location

Keystone, CO, USA

Print_ISBN

0-7803-3175-3

Type

conf

DOI

10.1109/LEOSST.1996.540795

Filename

540795