Mechanics analysis and design of pressure sensor

Based on the classical plate theory and elasticity theory, this paper analyzes and discusses sensor chip with all round fixed. It is studied on the behaviors of stress on the diaphragm of semiconductor piezoresistive pressure sensor. This provides a basis theory for designing sensor. We explore the value and width of resistors and give a particular description of the serial calculation. Based on the theory, by the use of finite-element method (FEM) software of ANSYS, then the simulation results are compared and analyzed for strain diaphragm of silicon piezoresistive pressure sensor. This paper investigates the linearity and dynamic frequency response of the sensor and obtains the reliable results.