Research of MEMS piezoresistive pressure sensor

Author

Yuan, Meng ; Liu, Ping ; She, Bo ; Tang, Youliang ; Xu, Yan

Author_Institution

Dept. of Mech. Eng., Suqian Coll., Suqian, China

Volume

1

fYear

2010

fDate

9-10 Oct. 2010

Firstpage

536

Lastpage

539

Abstract

A series of theoretical analysis about double island-beam structure sensor is discussed in this paper. The position for sitting resistances on the diaphragm, the resistance values and the width of the resistances are analyzed in detail. Utilizing finite-element method (FEM) and simulation software ANSYS, static and dynamics analysis and computer simulation are carried out for strain diaphragm of piezoresistive micro-pressure sensor. Analysis of simulation by ANSYS reveals that the structure sensor structure which we adopted in this paper has a high sensitivity, good linearity, and high anti-overload and so on.

Keywords

diaphragms; digital simulation; finite element analysis; island structure; microsensors; piezoresistive devices; pressure sensors; strain sensors; ANSYS; MEMS piezoresistive pressure sensor; computer simulation; double island-beam structure sensor; dynamics analysis; finite element method; piezoresistive micropressure sensor; resistance width; simulation software; static analysis; strain diaphragm; Crystals; Education; Stress; Stress measurement; MEMS sensor; performance study; resistance design;

fLanguage

English

Publisher

ieee

Conference_Titel

Future Information Technology and Management Engineering (FITME), 2010 International Conference on

Conference_Location

Changzhou

Print_ISBN

978-1-4244-9087-5

Type

conf

DOI

10.1109/FITME.2010.5655814

Filename

5655814