Optical waveguides on silicon combined with micromechanical structures

Author

Voges, E. ; Hoffmann, M.

Author_Institution

Lehrstuhl fur Hochfrequenztech., Dortmund Univ., Germany

fYear

1996

fDate

5-9 Aug. 1996

Firstpage

69

Lastpage

70

Abstract

The technologies for silica on silicon waveguides with emphasis on PECVD fabrication techniques are described including waveguide design and characterization. Applications of combined optical and micromechanical technologies refer to the fields of planar lightwave circuits and silicon motherboards for photonic devices, and to integrated sensor microsystems. Silicon-based preform technologies for replicated polymeric waveguide devices are included.

Keywords

elemental semiconductors; integrated optics; micromechanical devices; microsensors; optical fabrication; optical planar waveguides; optical sensors; plasma CVD; silicon; silicon compounds; PECVD fabrication; Si; SiO/sub 2/-Si; integrated sensor microsystems; micromechanical structures; optical technology; optical waveguides; photonic devices; planar lightwave circuits; replicated polymeric waveguide devices; silicon motherboards; silicon-based preform technologies; waveguide design; Integrated circuit technology; Integrated optics; Micromechanical devices; Optical device fabrication; Optical devices; Optical polymers; Optical sensors; Optical waveguides; Optoelectronic and photonic sensors; Silicon compounds;

fLanguage

English

Publisher

ieee

Conference_Titel

Advanced Applications of Lasers in Materials Processing/Broadband Optical Networks/Smart Pixels/Optical MEMs and Their Applications. IEEE/LEOS 1996 Summer Topical Meetings:

Conference_Location

Keystone, CO, USA

Print_ISBN

0-7803-3175-3

Type

conf

DOI

10.1109/LEOSST.1996.540798

Filename

540798