Title :
Humidity hysteresis and temperature property of MWNT-SiO2 thin film humidity sensor at AC testing
Author :
Tuo, Li ; Xiaowei, Liu
Author_Institution :
Dept. of Microelectron., Harbin Inst. of Technol., Harbin, China
Abstract :
Multiwall carbon nanotubes(MWNTs)-SiO2 composite thin film humidity sensors are fabricated and humidity hysteresis and temperature property for different MWNTs contents at AC testing are investigated in this paper. Shapes diversity for humidity hysteresis curves of different MWNTs proportion sensors are analyzed by capillary condensation effect. Sensors temperature property at 200 kHz frequency are based on the dielectric relaxation theory in dielectric physics. Sensor conductance increases as temperature rises because relaxation time is greatly infected by temperature. Sensitivity of sensors is also improved with the increasing temperature.
Keywords :
carbon nanotubes; humidity sensors; hysteresis; nanofabrication; nanosensors; silicon compounds; temperature sensors; thin film sensors; AC testing; C-SiO2; MWNT proportion sensor conductance; capillary condensation effect; dielectric physics; dielectric relaxation theory; frequency 200 kHz; humidity hysteresis; multiwall carbon nanotube composite thin film humidity sensor; sensor sensitivity; Films; Humidity; Hysteresis; Sensitivity; Temperature; Temperature sensors; Testing; AC testing; humidity hysteresis; humidity sensor; multiwall carbon nanotubes (MWNTs); temperature property;
Conference_Titel :
Optoelectronics and Microelectronics Technology (AISOMT), 2011 Academic International Symposium on
Conference_Location :
Harbin
Print_ISBN :
978-1-4577-0794-0
DOI :
10.1109/AISMOT.2011.6159371
