Title :
Thermal analysis of the liquid floating rotor type micromachined gyroscope
Author :
Haifeng, Zhang ; Dongbo, Wang ; Xiaowei, Liu ; Hai, Li
Author_Institution :
MEMS Center, Harbin Inst. of Technol., Harbin, China
Abstract :
Temperature has a great influence on the performance of the micro machined gyroscope. A finite element model was proposed to analysis the temperature field of the liquid floating rotor type of micro gyroscope using COMSOL. The temperature distribution of the gyroscope was studied at different rotation speed using the model. The simulation results indicated that the friction of the rotor is the main heat source. When the rotor rotation speed is 10000rpm, the maximum temperature is 38 °C. The result of the proposed model is in excellent agreement with the experimental measurements.
Keywords :
finite element analysis; gyroscopes; micromachining; microsensors; rotation; rotors; temperature distribution; thermal analysis; COMSOL; finite element model; heat source; liquid floating rotor; micromachined gyroscope; temperature distribution; temperature field analysis; thermal analysis; Finite element methods; Gyroscopes; Heating; Mathematical model; Rotors; Temperature distribution; Temperature measurement; Key word-floated gyroscope; finite element analysis software; temperature fields;
Conference_Titel :
Optoelectronics and Microelectronics Technology (AISOMT), 2011 Academic International Symposium on
Conference_Location :
Harbin
Print_ISBN :
978-1-4577-0794-0
DOI :
10.1109/AISMOT.2011.6159372
