MEMS applications in optical systems

Author

Mehregany, Mehran ; Merat, Frank

Author_Institution

Dept. of Electr. Eng. & Appl. Phys., Case Western Reserve Univ., Cleveland, OH, USA

fYear

1996

fDate

5-9 Aug. 1996

Firstpage

75

Lastpage

76

Abstract

We describe progress in the development of micro-optomechanical components which are compatible with MEMS and integrated circuit processing. Devices which have been developed include polygon and diffraction grating scanners, tunable laser diodes, tunable IR filters, and optical waveguides.

Keywords

diffraction gratings; integrated optics; integrated optoelectronics; laser mirrors; laser tuning; micromachining; micromechanical devices; optical fabrication; optical films; optical filters; optical scanners; optical waveguides; semiconductor lasers; MEMS applications; diffraction grating scanner; integrated circuit processing; micro-optomechanical components; optical systems; optical waveguides; polygon scanners; tunable IR filters; tunable laser diodes; Coatings; Diffraction gratings; Diode lasers; Micromechanical devices; Micromotors; Optical diffraction; Optical films; Optical filters; Optical waveguides; Tunable circuits and devices;

fLanguage

English

Publisher

ieee

Conference_Titel

Advanced Applications of Lasers in Materials Processing/Broadband Optical Networks/Smart Pixels/Optical MEMs and Their Applications. IEEE/LEOS 1996 Summer Topical Meetings:

Conference_Location

Keystone, CO, USA

Print_ISBN

0-7803-3175-3

Type

conf

DOI

10.1109/LEOSST.1996.540801

Filename

540801