Title :
MEMS applications in optical systems
Author :
Mehregany, Mehran ; Merat, Frank
Author_Institution :
Dept. of Electr. Eng. & Appl. Phys., Case Western Reserve Univ., Cleveland, OH, USA
Abstract :
We describe progress in the development of micro-optomechanical components which are compatible with MEMS and integrated circuit processing. Devices which have been developed include polygon and diffraction grating scanners, tunable laser diodes, tunable IR filters, and optical waveguides.
Keywords :
diffraction gratings; integrated optics; integrated optoelectronics; laser mirrors; laser tuning; micromachining; micromechanical devices; optical fabrication; optical films; optical filters; optical scanners; optical waveguides; semiconductor lasers; MEMS applications; diffraction grating scanner; integrated circuit processing; micro-optomechanical components; optical systems; optical waveguides; polygon scanners; tunable IR filters; tunable laser diodes; Coatings; Diffraction gratings; Diode lasers; Micromechanical devices; Micromotors; Optical diffraction; Optical films; Optical filters; Optical waveguides; Tunable circuits and devices;
Conference_Titel :
Advanced Applications of Lasers in Materials Processing/Broadband Optical Networks/Smart Pixels/Optical MEMs and Their Applications. IEEE/LEOS 1996 Summer Topical Meetings:
Conference_Location :
Keystone, CO, USA
Print_ISBN :
0-7803-3175-3
DOI :
10.1109/LEOSST.1996.540801
